Parallel ion optics and apparatus for high current low energy ion beams | Patent Number 05811820

US 05811820 NA
Application Number8662336
Publication Number-
Pendency2 years, 3 months, 12 days
Filled DateJun 12, 1996
Priority DateJun 13, 1995
Publication Date-
Expiration DateJun 13, 2015
Inventor/Applicants Efim A. Dynin
Felix G. Gutman
Oleg V. Alexandrov
Nicholas J. Kirchner
ExaminesLORING, SUSAN
Art Unit1641
Technology Center1600
Assignments
Massively Parallel Technologies Inc.
Current
Massively Parallel Technologies Inc.
Original
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