High density plasma passivation layer and method of application | Patent Application Number 9370422
9370422
Not Appealed
Inventor/Applicants Edward P. Martin, Jr.
Leonard J. Olmer
Barbara D. Kotzias
Daniel P. Chesire
Rafael N. Barba
Leonard J. Olmer
Barbara D. Kotzias
Daniel P. Chesire
Rafael N. Barba
ExaminesGHYKA, ALEXANDER G
Art Unit2812
Technology Center2800
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