High density plasma passivation layer and method of application | Patent Application Number 9370422

9370422
Not Appealed
Patent NumberUS 06153543 NA
Publication Number-
Filled DateAug 9, 1999
Priority DateAug 9, 1999
Inventor/Applicants Edward P. Martin, Jr.
Leonard J. Olmer
Barbara D. Kotzias
Daniel P. Chesire
Rafael N. Barba
ExaminesGHYKA, ALEXANDER G
Art Unit2812
Technology Center2800
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