High density plasma passivation layer and method of application | Patent Number 06153543

US 06153543 NA
Application Number9370422
Publication Number-
Pendency1 year, 3 months, 22 days
Filled DateAug 9, 1999
Priority DateAug 9, 1999
Publication Date-
Expiration DateAug 9, 2019
Inventor/Applicants Leonard J. Olmer
Rafael N. Barba
Barbara D. Kotzias
Edward P. Martin, Jr.
Daniel P. Chesire
ExaminesGHYKA, ALEXANDER G
Art Unit2812
Technology Center2800
Assignments
Bellnorthern Research
Current
Hilco Patent Acquisition 55 Llc
Current
Bell Semiconductor Llc
Current
Lucent Technologies
Original
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