Automated wafer defect inspection system and a process of performing such inspection | Patent Application Number 9562273

9562273
Not Appealed
Patent NumberUS 06826298 B1
Publication Number-
Filled DateApr 29, 2000
Priority DateJul 14, 1998
Inventor/ApplicantsMark Harless
Thomas Verburgt
Jeffrey O'Dell
Cory Watkins
ExaminesAHMED, SAMIR ANWAR
Art Unit2623
Technology Center2600
Assignments
Rudolph Techologies
Current
August Technology Corp.
Original
Law Firm
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