Automated wafer defect inspection system and a process of performing such inspection | Patent Number 06826298

US 06826298 B1
Application Number9562273
Publication Number-
Pendency4 years, 7 months, 6 days
Filled DateApr 29, 2000
Priority DateJul 14, 1998
Publication Date-
Expiration DateJul 14, 2018
Inventor/ApplicantsCory Watkins
Mark Harless
Jeffrey O'Dell
Thomas Verburgt
ExaminesAHMED, SAMIR ANWAR
Art Unit2623
Technology Center2600
Assignments
Rudolph Techologies
Current
August Technology Corp.
Original
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