Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework | Patent Application Number 9629073

9629073
Not Appealed
Patent NumberUS 06725402 B1
Publication Number-
Filled DateJul 31, 2000
Priority DateJul 31, 2000
Inventor/ApplicantsQingsu Wang
Terrence J. Riley
Elfido Coss, Jr.
ExaminesDAMIANO, ANNE L
Art Unit2114
Technology Center2100
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