Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework | Patent Number 06725402

US 06725402 B1
Application Number9629073
Publication Number-
Pendency3 years, 8 months, 24 days
Filled DateJul 31, 2000
Priority DateJul 31, 2000
Publication Date-
Expiration DateJul 31, 2020
Inventor/ApplicantsElfido Coss, Jr.
Terrence J. Riley
Qingsu Wang
ExaminesDAMIANO, ANNE L
Art Unit2114
Technology Center2100
Assignments
Advanced Micro Devices Inc
Current
Advanced Micro Devices Inc
Original
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