Low dielectric constant etch stop layers in integrated circuit interconnects | Patent Application Number 9776012
9776012
Not Appealed
Inventor/ApplicantsDawn M. Hopper
Minh Van Ngo
Robert A. Huertas
Terri J. Kitson
Minh Van Ngo
Robert A. Huertas
Terri J. Kitson
ExaminesNGUYEN, HA TRAN
Art Unit2812
Technology Center2800
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