Run to run control process for controlling critical dimensions | Patent Application Number 9908390

9908390
Not Appealed
Patent NumberUS RE039518 E1
Publication Number-
Filled DateJul 18, 2001
Priority DateMay 28, 1997
Inventor/ApplicantsDouglas John Downey
Subhash Gupta
Anthony John Toprac
ExaminesCOLEMAN, WILLIAM D
Art Unit2823
Technology Center2800
Assignments
Lone Star Silicon Innovations Llc
Current
Advanced Micro Devices Inc
Original
Law Firm
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