Run to run control process for controlling critical dimensions | Patent Number RE039518

US RE039518 E1
Application Number9908390
Publication Number-
Pendency5 years, 7 months, 29 days
Filled DateJul 18, 2001
Priority DateMay 28, 1997
Publication Date-
Expiration DateMay 28, 2017
Inventor/ApplicantsDouglas John Downey
Anthony John Toprac
Subhash Gupta
ExaminesCOLEMAN, WILLIAM D
Art Unit2823
Technology Center2800
Assignments
Lone Star Silicon Innovations Llc
Current
Advanced Micro Devices Inc
Original
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