Method of forming a high quality gate oxide layer having a uniform thickness | Patent Number 06544907
US 06544907 B1Filled DateOct 12, 2000
Priority DateOct 12, 2000
Publication Date-
Expiration DateOct 12, 2020
Inventor/ApplicantsYi Ma
Edith Yang
Edith Yang
ExaminesEVERHART, CARIDAD
Art Unit2825
Technology Center2800
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