Method of forming a porous film on a substrate | Patent Number 06602802
US 06602802 B2Filled DateApr 22, 2002
Priority DateJan 27, 2000
Publication DateAug 29, 2002
Expiration DateJan 27, 2020
Inventor/ApplicantsNobuo Aoi
Nobuo Aoi
Nobuo Aoi
ExaminesLE, DUNG ANH
Art Unit2818
Technology Center2800
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