Method of forming a porous film on a substrate | Patent Publication Number 20020119676

US 20020119676 A1
Patent NumberUS 06602802 B2
Application Number10126687
Filled DateApr 22, 2002
Priority DateJan 27, 2000
Publication DateAug 29, 2002
Original AssigneePanasonic
Current AssigneeGodo Kaisha Ip Bridge 1
Inventor/ApplicantsNobuo Aoi
Nobuo Aoi
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