Use of high-K dielectric material in modified ONO structure for semiconductor devices | Patent Number 06642573
US 06642573 B1Filled DateMar 13, 2002
Priority DateMar 13, 2002
Publication Date-
Expiration DateMar 13, 2022
Inventor/ApplicantsWei Zhang
Mark W. Randolph
Arvind Halliyal
Fred T. K. Cheung
Mark T. Ramsbey
Mark W. Randolph
Arvind Halliyal
Fred T. K. Cheung
Mark T. Ramsbey
ExaminesBOOTH, RICHARD A
Art Unit2812
Technology Center2800
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