Structure having reduced lateral spacer erosion | Patent Number 06784552
US 06784552 B2Filled DateMar 31, 2000
Priority DateDec 22, 1995
Publication DateOct 10, 2002
Expiration DateDec 22, 2015
Inventor/ApplicantsChristopher J. Petti
James E. Nulty
James E. Nulty
Christopher J. Petti
James E. Nulty
James E. Nulty
Christopher J. Petti
ExaminesCHU, CHRIS C
Art Unit2815
Technology Center2800
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