Structure having reduced lateral spacer erosion | Patent Publication Number 20020146897

US 20020146897 A1
Patent NumberUS 06784552 B2
Application Number9540610
Filled DateMar 31, 2000
Priority DateDec 22, 1995
Publication DateOct 10, 2002
Original AssigneeInfineon Technologies Ag
Current AssigneeFortress Credit Corp.
Inventor/ApplicantsChristopher J. Petti
James E. Nulty
James E. Nulty
Christopher J. Petti
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