Split barrier layer including nitrogen-containing portion and oxygen-containing portion | Patent Number 06879046

US 06879046 B2
Application Number10038371
Publication NumberUS 20030003765 A1
Pendency3 years, 3 months, 11 days
Filled DateJan 2, 2002
Priority DateJun 28, 2001
Publication DateJan 2, 2003
Expiration DateJun 28, 2021
Inventor/ApplicantsScott Jessen
Susan Clay Vitkavage
Kurt George Steiner
Steven Alan Lytle
Gerald W Gibson, Jr.
Scott Jessen
Kurt George Steiner
Susan Clay Vitkavage
Steven Alan Lytle
Gerald W. JR. Gibson
ExaminesCHU, CHRIS C
Art Unit2815
Technology Center2800
Assignments
Bellnorthern Research
Current
Bell Semiconductor Llc
Current
Hilco Patent Acquisition 55 Llc
Current
Agere Systems BroadcomBroadcom
Original
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