Split barrier layer including nitrogen-containing portion and oxygen-containing portion | Patent Publication Number 20030003765
US 20030003765 A1Patent NumberUS 06879046 B2
Application Number10038371
Filled DateJan 2, 2002
Priority DateJun 28, 2001
Publication DateJan 2, 2003
Original AssigneeBroadcom
Inventor/ApplicantsKurt George Steiner
Gerald W Gibson, Jr.
Steven Alan Lytle
Scott Jessen
Susan Clay Vitkavage
Scott Jessen
Kurt George Steiner
Steven Alan Lytle
Gerald W. JR. Gibson
Susan Clay Vitkavage
Gerald W Gibson, Jr.
Steven Alan Lytle
Scott Jessen
Susan Clay Vitkavage
Scott Jessen
Kurt George Steiner
Steven Alan Lytle
Gerald W. JR. Gibson
Susan Clay Vitkavage
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