High-power pulsed magnetically enhanced plasma processing | Patent Number 06896775

US 06896775 B2
Application Number10065551
Publication NumberUS 20040082187 A1
Pendency2 years, 6 months, 28 days
Filled DateOct 29, 2002
Priority DateOct 29, 2002
Publication DateApr 29, 2004
Expiration DateMay 24, 2017
Inventor/ApplicantsRoman Chistyakov
Roman Chistyakov
ExaminesMCDONALD, RODNEY GLENN
Art Unit1753
Technology Center1700
Assignments
Zond
Current
Zond
Original
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