High-power pulsed magnetically enhanced plasma processing | Patent Publication Number 20040082187

US 20040082187 A1
Patent NumberUS 06896775 B2
Application Number10065551
Filled DateOct 29, 2002
Priority DateOct 29, 2002
Publication DateApr 29, 2004
Original AssigneeZond
Current AssigneeZond
Inventor/ApplicantsRoman Chistyakov
Roman Chistyakov
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