Semiconductor device having internal stress film | Patent Number 07417289

US 07417289 B2
Application Number11730988
Publication NumberUS 20070194388 A1
Pendency1 year, 4 months, 24 days
Filled DateApr 5, 2007
Priority DateJun 3, 2004
Publication DateAug 23, 2007
Expiration DateJun 3, 2024
Inventor/ApplicantsKaori Akamatsu
Masafumi Tsutsui
Hiroyuki Umimoto
ExaminesWEISS, HOWARD
Art Unit2814
Technology Center2800
Assignments
Godo Kaisha Ip Bridge 1
Current
Panasonic
Original
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