Semiconductor device having internal stress film | Patent Publication Number 20070194388

US 20070194388 A1

Patent NumberUS 07417289 B2

Application Number11730988

Filled DateApr 5, 2007

Priority DateJun 3, 2004

Publication DateAug 23, 2007

Original AssigneePanasonic

Current AssigneeGodo Kaisha Ip Bridge 1

Inventor/ApplicantsMasafumi Tsutsui
Hiroyuki Umimoto
Kaori Akamatsu

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