Wafer with optical control modules in exposure fields | Patent Number 07538444

US 07538444 B2
Application Number10584504
Publication NumberUS 20070152303 A1
Pendency4 years, 5 months, 19 days
Filled DateDec 9, 2004
Priority DateDec 9, 2004
Publication DateJul 5, 2007
Expiration DateDec 9, 2024
Inventor/ApplicantsHeimo Scheucher
Guenther Pfeiler
Rik Wenting
ExaminesQUINTO, KEVIN V
Art Unit2826
Technology Center2800
Assignments
Philips Semiconductors Inc.
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