Wafer with optical control modules in exposure fields | Patent Publication Number 20070152303

US 20070152303 A1

Patent NumberUS 07538444 B2

Application Number10584504

Filled DateDec 9, 2004

Priority DateDec 9, 2004

Publication DateJul 5, 2007

Original Assignee

Current AssigneePhilips Semiconductors Inc.

Inventor/ApplicantsGuenther Pfeiler
Heimo Scheucher
Rik Wenting

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