Methods and apparatus for generating high-density plasma | Patent Number 07604716

US 07604716 B2
Application Number10897257
Publication NumberUS 20050006220 A1
Pendency5 years, 3 months, 1 day
Filled DateJul 22, 2004
Priority DateJul 22, 2004
Publication DateJan 13, 2005
Expiration DateOct 20, 2021
Inventor/ApplicantsRoman Chistyakov
ExaminesMCDONALD, RODNEY GLENN
Art Unit1795
Technology Center1700
Assignments
Zond
Current
Zond
Original
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