Methods and apparatus for generating high-density plasma | Patent Publication Number 20050006220

US 20050006220 A1

Patent NumberUS 07604716 B2

Application Number10897257

Filled DateJul 22, 2004

Priority DateJul 22, 2004

Publication DateJan 13, 2005

Original AssigneeZond

Current AssigneeZond

Inventor/ApplicantsRoman Chistyakov

Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.

Check our Latest Report Purchase IP Module

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.