Integrated circuit with contact region and multiple etch stop insulation layer | Patent Number 07977797
US 07977797 B2Filled DateAug 11, 2009
Priority DateSep 2, 2004
Publication DateDec 3, 2009
Expiration DateSep 2, 2024
Inventor/ApplicantsAngela T. Hui
Dawn Hopper
Dawn HOPPER
Wenmei Li
Angela T. HUI
Wenmei LI
Kouros Ghandehari
Kouros GHANDEHARI
Dawn Hopper
Dawn HOPPER
Wenmei Li
Angela T. HUI
Wenmei LI
Kouros Ghandehari
Kouros GHANDEHARI
ExaminesSMOOT, STEPHEN W
Art Unit2813
Technology Center2800
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