Integrated circuit with contact region and multiple etch stop insulation layer | Patent Number 07977797

US 07977797 B2
Application Number12539480
Publication NumberUS 20090294969 A1
Pendency1 year, 11 months, 5 days
Filled DateAug 11, 2009
Priority DateSep 2, 2004
Publication DateDec 3, 2009
Expiration DateSep 2, 2024
Inventor/ApplicantsAngela T. Hui
Dawn Hopper
Dawn HOPPER
Wenmei Li
Angela T. HUI
Wenmei LI
Kouros Ghandehari
Kouros GHANDEHARI
ExaminesSMOOT, STEPHEN W
Art Unit2813
Technology Center2800
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