FinFET device including a stepped profile structure | Patent Number 09166053

US 09166053 B2
Application Number13774724
Publication NumberUS 20140239393 A1
Pendency2 years, 8 months
Filled DateFeb 22, 2013
Priority DateFeb 22, 2013
Publication DateAug 28, 2014
Expiration DateFeb 21, 2033
Inventor/ApplicantsYuan-Shun Chao
Hou-Yu Chen
Shyh-Horng Yang
Chih-Wei Kuo
ExaminesRUNDIO, REGAN J
Art Unit2899
Technology Center2800
Assignments
Taiwan Semiconductor Manufacturing Company
Current
Taiwan Semiconductor Manufacturing Company
Original
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