FinFET device including a stepped profile structure | Patent Publication Number 20140239393
US 20140239393 A1Patent NumberUS 09166053 B2
Application Number13774724
Filled DateFeb 22, 2013
Priority DateFeb 22, 2013
Publication DateAug 28, 2014
Original AssigneeTaiwan Semiconductor Manufacturing Company
Current AssigneeTaiwan Semiconductor Manufacturing Company
Inventor/ApplicantsChih-Wei Kuo
Hou-Yu Chen
Yuan-Shun Chao
Shyh-Horng Yang
Hou-Yu Chen
Yuan-Shun Chao
Shyh-Horng Yang
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