Method for manufacturing gallium nitride compound semiconductor and light emitting element | Patent Publication Number 20030094618

US 20030094618 A1

Patent NumberUS 06861270 B2

Application Number10092231

Filled DateMar 6, 2002

Priority DateMar 6, 2002

Publication DateMay 22, 2003

Original AssigneeNitride Semiconductors Co. Ltd.

Current AssigneeNitride Semiconductors Co. Ltd.

Inventor/ApplicantsShiro Sakai
Shiro Sakai

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