High-density plasma source using excited atoms | Patent Publication Number 20040212312

US 20040212312 A1
Patent NumberUS 06806652 B1
Application Number10249844
Filled DateMay 12, 2003
Priority DateApr 22, 2003
Publication DateOct 28, 2004
Original AssigneeZond
Current AssigneeZond
Inventor/ApplicantsRoman Chistyakov
Roman Chistyakov
Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.
Check our Latest ReportPurchase IP Module

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.