Semiconductor device and method for high-k gate dielectrics | Patent Publication Number 20060131675

US 20060131675 A1
Patent NumberUS 07355235 B2
Application Number11020377
Filled DateDec 22, 2004
Priority DateDec 22, 2004
Publication DateJun 22, 2006
Inventor/ApplicantsChing-Wei Tsai
Chih-Hao Wang
Shang-Chih Chen
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