Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide | Patent Publication Number 20120028478

US 20120028478 A1
Patent NumberUS 08334016 B2
Application Number12407556
Filled DateMar 19, 2009
Priority DateSep 28, 2000
Publication DateFeb 2, 2012
Original AssigneeHarvard College
Current AssigneeHarvard College
Inventor/ApplicantsSeigi Suh
Roy G. Gordon
Dennis Hausmann
Jill S. Becker
Jill Becker
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