High-power pulsed magnetron sputtering | Patent Application Number 10065277

10065277
Not Appealed
Patent NumberUS 07147759 B2
Publication NumberUS 20040060813 A1
Filled DateSep 30, 2002
Priority DateSep 30, 2002
Inventor/ApplicantsRoman Chistyakov
Roman Chistyakov
ExaminesMCDONALD, RODNEY GLENN
Art Unit1753
Technology Center1700
Assignments
Zond
Current
Zond
Original
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