High-power pulsed magnetron sputtering | Patent Publication Number 20040060813

US 20040060813 A1
Patent NumberUS 07147759 B2
Application Number10065277
Filled DateSep 30, 2002
Priority DateSep 30, 2002
Publication DateApr 1, 2004
Original AssigneeZond
Current AssigneeZond
Inventor/ApplicantsRoman Chistyakov
Roman Chistyakov
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