High-power pulsed magnetron sputtering | Patent Number 07147759
US 07147759 B2Filled DateSep 30, 2002
Priority DateSep 30, 2002
Publication DateApr 1, 2004
Expiration DateDec 12, 2018
Inventor/ApplicantsRoman Chistyakov
Roman Chistyakov
Roman Chistyakov
ExaminesMCDONALD, RODNEY GLENN
Art Unit1753
Technology Center1700
Assignments
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