Methods and apparatus for generating high-density plasma | Patent Application Number 10065629

10065629
Not Appealed
Patent NumberUS 06853142 B2
Publication NumberUS 20040085023 A1
Filled DateNov 4, 2002
Priority DateNov 4, 2002
Inventor/ApplicantsRoman Chistyakov
Roman Chistyakov
ExaminesLEE, WILSON
Art Unit2821
Technology Center2800
Assignments
Zond
Current
Zond
Original
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