Methods and apparatus for generating high-density plasma | Patent Number 06853142

US 06853142 B2
Application Number10065629
Publication NumberUS 20040085023 A1
Pendency2 years, 3 months, 7 days
Filled DateNov 4, 2002
Priority DateNov 4, 2002
Publication DateMay 6, 2004
Expiration DateNov 4, 2022
Inventor/ApplicantsRoman Chistyakov
Roman Chistyakov
ExaminesLEE, WILSON
Art Unit2821
Technology Center2800
Assignments
Zond
Current
Zond
Original
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