Methods and apparatus for generating high-density plasma | Patent Publication Number 20040085023

US 20040085023 A1
Patent NumberUS 06853142 B2
Application Number10065629
Filled DateNov 4, 2002
Priority DateNov 4, 2002
Publication DateMay 6, 2004
Original AssigneeZond
Current AssigneeZond
Inventor/ApplicantsRoman Chistyakov
Roman Chistyakov
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