Semiconductor wafer with process control modules | Patent Application Number 10081893

10081893
Not Appealed
Patent NumberUS 06680523 B2
Publication NumberUS 20020117735 A1
Filled DateFeb 21, 2002
Priority DateFeb 21, 2002
Inventor/ApplicantsJoachim H. Schober
Paul Hubmer
Joachim H. Schober
Heimo Scheucher
Heimo Scheucher
Paul Hubmer
ExaminesTHAI, DAVIS
Art Unit2827
Technology Center2800
Assignments
Philips Semiconductors Inc.
Current
Koninklijke Philips N.v.
Original
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