Semiconductor wafer with process control modules | Patent Publication Number 20020117735

US 20020117735 A1
Patent NumberUS 06680523 B2
Application Number10081893
Filled DateFeb 21, 2002
Priority DateFeb 21, 2002
Publication DateAug 29, 2002
Original AssigneeKoninklijke Philips N.v.
Inventor/ApplicantsJoachim H. Schober
Paul Hubmer
Joachim H. Schober
Heimo Scheucher
Heimo Scheucher
Paul Hubmer
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