Semiconductor wafer with process control modules | Patent Number 06680523
US 06680523 B2Filled DateFeb 21, 2002
Priority DateFeb 21, 2002
Publication DateAug 29, 2002
Expiration DateFeb 21, 2022
Inventor/ApplicantsPaul Hubmer
Joachim H. Schober
Heimo Scheucher
Heimo Scheucher
Joachim H. Schober
Paul Hubmer
Joachim H. Schober
Heimo Scheucher
Heimo Scheucher
Joachim H. Schober
Paul Hubmer
ExaminesTHAI, DAVIS
Art Unit2827
Technology Center2800
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