Automated wafer defect inspection system and a process of performing such inspection | Patent Application Number 10915666

10915666
Not Appealed
Patent NumberUS 07729528 B2
Publication NumberUS 20050008218 A1
Filled DateAug 10, 2004
Priority DateJul 14, 1998
Inventor/ApplicantsJeffrey O'Dell
Thomas Verburgt
Cory Watkins
Mark Harless
ExaminesSTREGE, JOHN B
Art Unit2624
Technology Center2600
Assignments
Rudolph Techologies
Current
Rudolph Techologies
Original
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