Automated wafer defect inspection system and a process of performing such inspection | Patent Number 07729528

US 07729528 B2
Application Number10915666
Publication NumberUS 20050008218 A1
Pendency5 years, 9 months, 26 days
Filled DateAug 10, 2004
Priority DateJul 14, 1998
Publication DateJan 13, 2005
Expiration DateJul 14, 2018
Inventor/ApplicantsThomas Verburgt
Jeffrey O'Dell
Mark Harless
Cory Watkins
ExaminesSTREGE, JOHN B
Art Unit2624
Technology Center2600
Assignments
Rudolph Techologies
Current
Rudolph Techologies
Original
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