Automated wafer defect inspection system and a process of performing such inspection | Patent Publication Number 20050008218

US 20050008218 A1

Patent NumberUS 07729528 B2

Application Number10915666

Filled DateAug 10, 2004

Priority DateJul 14, 1998

Publication DateJan 13, 2005

Original AssigneeRudolph Techologies

Current AssigneeRudolph Techologies

Inventor/ApplicantsJeffrey O'Dell
Thomas Verburgt
Cory Watkins
Mark Harless

Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.

Check our Latest Report Purchase IP Module

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.