Method for manufacturing dual damascene structure with a trench formed first | Patent Application Number 10919328

10919328
Not Appealed
Patent NumberUS 07056821 B2
Publication NumberUS 20060040498 A1
Filled DateAug 17, 2004
Priority DateAug 17, 2004
Inventor/ApplicantsJuan-Jann Jou
Chia-Hung Lai
Yu-Hua Lee
Chin-Tien Yang
ExaminesAHMADI, MOHSEN
Art Unit2812
Technology Center2800
Assignments
Trenchant Blade Technologies Llc
Current
Taiwan Semiconductor Manufacturing Company
Original
Law Firm
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