Method for manufacturing dual damascene structure with a trench formed first | Patent Publication Number 20060040498

US 20060040498 A1

Patent NumberUS 07056821 B2

Application Number10919328

Filled DateAug 17, 2004

Priority DateAug 17, 2004

Publication DateFeb 23, 2006

Original AssigneeTaiwan Semiconductor Manufacturing Company

Current AssigneeTrenchant Blade Technologies Llc

Inventor/ApplicantsJuan-Jann Jou
Chia-Hung Lai
Yu-Hua Lee
Chin-Tien Yang

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