Method for manufacturing dual damascene structure with a trench formed first | Patent Number 07056821

US 07056821 B2
Application Number10919328
Publication NumberUS 20060040498 A1
Pendency1 year, 9 months, 23 days
Filled DateAug 17, 2004
Priority DateAug 17, 2004
Publication DateFeb 23, 2006
Expiration DateAug 17, 2024
Inventor/ApplicantsChia-Hung Lai
Yu-Hua Lee
Juan-Jann Jou
Chin-Tien Yang
ExaminesAHMADI, MOHSEN
Art Unit2812
Technology Center2800
Assignments
Trenchant Blade Technologies Llc
Current
Taiwan Semiconductor Manufacturing Company
Original
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