Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces | Patent Application Number 11217151

11217151
Not Appealed
Patent NumberUS 07326105 B2
Publication NumberUS 20070049179 A1
Filled DateAug 31, 2005
Priority DateAug 31, 2005
Inventor/ApplicantsNagasubramaniyan Chandrasekaran
ExaminesACKUN, JACOB K
Art Unit3728
Technology Center3700
Assignments
Micron Technology Inc.
Current
Micron Semiconductor Inc.
Current
Innovative Micro Technology
Original
Micron Technology Inc.
Original
Law Firm
You must be logged in to view
Login
Attorneys
Subscription-Only
View Concierge Program
Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.
Check our Latest ReportPurchase IP Module

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.