Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces | Patent Number 07326105

US 07326105 B2
Application Number11217151
Publication NumberUS 20070049179 A1
Pendency2 years, 5 months, 8 days
Filled DateAug 31, 2005
Priority DateAug 31, 2005
Publication DateMar 1, 2007
Expiration DateAug 30, 2025
Inventor/ApplicantsNagasubramaniyan Chandrasekaran
ExaminesACKUN, JACOB K
Art Unit3728
Technology Center3700
Assignments
Micron Semiconductor Inc.
Current
Micron Technology Inc.
Current
Micron Technology Inc.
Original
Innovative Micro Technology
Original
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